Home › Words › H › heteroepitaxyheteroepitaxyheteroepitaxy means A form of epitaxy in which one kind of crystal is grown upon the surface of a different type. The process of depositing an epitaxial layer on a substrate of a different material.Among words judged in Lexicurio's Arena, heteroepitaxy ranks #33,912 of 42,752 for Qualifying.EtymologyFrom hetero- + epitaxy.nounA form of epitaxy in which one kind of crystal is grown upon the surface of a different type. The process of depositing an epitaxial layer on a substrate of a different materialDefinitions & examples from Wiktionary (CC BY-SA 3.0).